PATTERNING AND EPITAXY OF LARGE-AREA ARRAYS OF NANOSCALE COMPLEX OXIDE EPITAXIAL HETEROSTRUCTURES

A combination of block copolymer (BCP) lithography and solid-phase epitaxy can be employed to form large areas, on the order of square centimeters, of a high density of epitaxial crystalline complex oxide nanostructures.We have used BCP lithography with a poly(styrene-block-methyl methacrylate) (PS-b-PMMA) copolymer to template a nanohole array eit